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    Title :

    Analytical model of electrostatic actuators for micro gas pumps


    Contributors:
    Zhang, Y. (author) / Wang, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 10-11 ; 1683-1696


    Publication date :

    2011-01-01


    Size :

    14 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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