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    Title :

    Comparison of etch characteristics of KOH, TMAH and EDP for bulk micromachining of silicon (110)


    Contributors:
    Dutta, S. (author) / Imran, M. (author) / Kumar, P. (author) / Pal, R. (author) / Datta, P. (author) / Chatterjee, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 10-11 ; 1621-1628


    Publication date :

    2011-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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