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    Title :

    Advanced Etch Tool for High Etch Rate Deep Reactive Ion Etching in Silicon Micromachining Production Environment


    Contributors:

    Conference:

    Conference; 5th, Advanced microsystems for automotive applications ; 2001



    Publication date :

    2001-01-01


    Size :

    8 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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