Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Silicon Bulk Micromachining in Tohoku University




    Publication date :

    1996-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.1



    Silicon Bulk Micromachining in Tohoku University

    Minami, K. / Esashi, M. / ASME; Aerospace Division | British Library Conference Proceedings | 1996


    Fibre-optical MEMS switches based on bulk silicon micromachining

    Hoffmann, M. / Kopka, P. / Nusse, D. et al. | British Library Online Contents | 2003


    Micromachining Of Silicon

    Dickman, John E. | NTRS | 1988


    Tohoku University low-turbulence wind tunnel

    KOHAMA, Y. / KOBAYASHI, R. / ITO, H. | AIAA | 1992


    Silicon mirror arrays fabricated by using bulk and surface micromachining [3008-34]

    Gessner, T. / Doetzel, W. / Billep, D. et al. | British Library Conference Proceedings | 1997