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    Title :

    Silicon Bulk Micromachining in Tohoku University



    Conference:

    Symposium, Micro-electro-mechanical systems (MEMS): Proceedings of the ASME Aerospace Division ; 1996 ; Atlanta; GA



    Publication date :

    1996-01-01


    Size :

    8 pages


    Remarks:

    Held as part of the 1996



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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