Electropolishing as a method for deburring high aspect ratio nickel RF MEMS
MICROSYSTEM TECHNOLOGIES ; 16 , 8-9 ; 1361-1367
2010-01-01
7 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Metrology of high aspect ratio MEMS
British Library Online Contents | 2004
|Low g Inertial Sensor based on High Aspect Ratio MEMS
British Library Conference Proceedings | 2005
|Manufacturing costs for microsystems/MEMS using high aspect ratio microfabrication techniques
British Library Online Contents | 2007
|BPN a new thick negative photoresist with high aspect ratio for MEMS applications
British Library Online Contents | 2013
|A Novel High Aspect Ratio Technology for MEMS Fabrication Using Standard Silicon Wafers
British Library Conference Proceedings | 2003
|