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    Title :

    Low g Inertial Sensor based on High Aspect Ratio MEMS


    Contributors:

    Conference:

    ANNUAL INTERNATIONAL FORUM, Advanced microsystems for automotive applications ; 2005 ; Berlin



    Publication date :

    2005-01-01


    Size :

    14 pages


    Remarks:

    ALSO KNOWN AS AMAA 2005



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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