Manufacturing costs for microsystems/MEMS using high aspect ratio microfabrication techniques
MICROSYSTEM TECHNOLOGIES ; 13 , 1 ; 85-95
2007-01-01
11 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
British Library Conference Proceedings | 2000
|Micro-ECM for production of microsystems with a high aspect ratio
British Library Online Contents | 2005
|Metrology of high aspect ratio MEMS
British Library Online Contents | 2004
|British Library Online Contents | 1999
|Low g Inertial Sensor based on High Aspect Ratio MEMS
British Library Conference Proceedings | 2005
|