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    Title :

    Microsystems for diverse applications using recently developed microfabrication techniques [4179-202]


    Contributors:
    Dellmann, L. (author) / Akiyama, T. (author) / Briand, D. (author) / Gautsch, S. (author) / Guenat, O. T. (author) / Guldimann, B. (author) / Luginbuhl, P. (author) / Marxer, C. (author) / Staufer, U. (author) / van der Schoot, B. (author)

    Conference:

    Conference, Micromachining technology for micro-optics ; 2000 ; Santa Clara, CA



    Publication date :

    2000-01-01


    Size :

    14 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4179

    DataCite | 1925


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    Beam-shaping elements for holographic applications [4179-02]

    Kley, E.-B. / Cumme, M. / Wittig, L.-C. et al. | British Library Conference Proceedings | 2000



    Bulk micromachining for sensors and actuators [4179-201]

    Esashi, M. / International Society for Optical Engineering / Semiconductor Equipment and Materials International et al. | British Library Conference Proceedings | 2000