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    Title :

    Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme


    Contributors:
    Song, I. H. (author) / Peter, Y. A. (author) / Meunier, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 7 ; 973-979


    Publication date :

    2009-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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