Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme
MICROSYSTEM TECHNOLOGIES ; 15 , 7 ; 973-979
2009-01-01
7 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
A high sensitive MEMS capacitive fingerprint sensor using slotted membrane
British Library Online Contents | 2013
|Tunable Optical Bandpass Filter With Variable-Aperture MEMS Reflector
British Library Online Contents | 2006
|A novel high sensitive MEMS intraocular capacitive pressure sensor
British Library Online Contents | 2013
|Optimization of MEMS capacitive accelerometer
British Library Online Contents | 2013
|