Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    A novel high sensitive MEMS intraocular capacitive pressure sensor


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 2 ; 187-194


    Publication date :

    2013-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    A high sensitive MEMS capacitive fingerprint sensor using slotted membrane

    Ganji, B. A. / Nateri, M. S. | British Library Online Contents | 2013


    Performance Analysis and Simulation of MEMS Capacitive Pressure Sensor

    Ananthi, S. / Lamba, Monica / Chaudhary, Himanshu et al. | Springer Verlag | 2022


    Liquid crystal polymer based MEMS capacitive pressure sensor [5798-30]

    Palasagaram, J. N. / Ramadoss, R. | British Library Conference Proceedings | 2005


    CMOS integrated elliptic diaphragm capacitive pressure sensor in SiGe MEMS

    Sundararajan, A. D. / Rezaul Hasan, S. M. | British Library Online Contents | 2014


    High-performance capacitive humidity sensor with novel electrode and polyimide layer based on MEMS technology

    Kim, J. H. / Hong, S. M. / Moon, B. M. et al. | British Library Online Contents | 2010