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    Title :

    High-performance capacitive humidity sensor with novel electrode and polyimide layer based on MEMS technology


    Contributors:
    Kim, J. H. (author) / Hong, S. M. (author) / Moon, B. M. (author) / Kim, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 12 ; 2017-2021


    Publication date :

    2010-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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