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    Title :

    Manufacturing process for high aspect ratio metallic micro parts made by electroplating on partially conductive templates


    Contributors:
    Prokop, J. (author) / Finnah, G. (author) / Lorenz, J. (author) / Piotter, V. (author) / Ruprecht, R. (author) / Hausselt, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1669-1674


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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