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    Title :

    Characterisation of high aspect ratio non-conductive ceramic microstructures made by spark erosion


    Contributors:
    Hösel, T. (author) / Cvancara, P. (author) / Ganz, T. (author) / Müller, C. (author) / Reinecke, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 2 ; 313-318


    Publication date :

    2011-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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