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    Title :

    Measurement of side walls of high aspect ratio microstructures


    Contributors:
    Simon, M. (author) / Reznikova, E. (author) / Nazmov, V. (author) / Last, A. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1727-1729


    Publication date :

    2008-01-01


    Size :

    3 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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