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    Title :

    High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures


    Contributors:
    Yang, R. (author) / Mullen, C. (author) / Schaline, M. (author) / Reithmaier, K. (author) / Sheets, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1233-1243


    Publication date :

    2008-01-01


    Size :

    11 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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