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    Title :

    High-aspect-ratio microstructures fabricated by X-ray lithography of polymethylsilses-quioxane-based spin-on glass thick films


    Contributors:
    Liu, Y. (author) / Cui, T. (author) / Coane, P. J. (author) / Vasile, M. J. (author) / Goettert, J. (author)

    Published in:

    Publication date :

    2003-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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