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    Title :

    High aspect ratio micro tool manufacturing for polymer replication using μEDM of silicon, selective etching and electroforming


    Contributors:
    Tosello, G. (author) / Bissacco, G. (author) / Tang, P. T. (author) / Hansen, H. N. (author) / Nielsen, P. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1757-1764


    Publication date :

    2008-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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