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    Title :

    Stiction issues and actuation of RF LIGA-MEMS variable capacitors


    Contributors:
    Haluzan, D. T. (author) / Klymyshyn, D. M. (author) / Börner, M. (author) / Achenbach, S. (author) / Wells, G. (author) / Mappes, T. (author) / Mohr, J. r. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1709-1714


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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