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    Title :

    Modeling and modification of the parallel plate variable MEMS capacitors considering deformation issue


    Contributors:

    Published in:

    Publication date :

    2009



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    Classification :

    BKL:    52.20 Antriebstechnik, Getriebelehre / 50.32 Dynamik, Schwingungslehre / 50.25 Robotertechnik




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