This paper describes the design, test and qualification of MEMS optical switches developed at Umachines, Inc. The mirror monolithically integrated with MEMS actuator is driven by electromagnetic force and is perpendicular to light path during movement. Low voltage (< 1V) and low current (<10 mA) requirement of the MEMS actuators simplifies the control electronic circuits. Fully packaged 2/spl times/2 add/drop switches have passed rigorous Telcordia/sup /spl trade// GR-1221.
Design, test and qualification of stiction-free MEMS optical switches
2003-01-01
89858 byte
Conference paper
Electronic Resource
English
Design, test and qualification of stiction-free MEMS optical switches
British Library Conference Proceedings | 2003
|IEEE | 2001
|British Library Conference Proceedings | 2001
|Design of novel compact anti-stiction and low insertion loss RF MEMS switch
British Library Online Contents | 2014
|Stiction issues and actuation of RF LIGA-MEMS variable capacitors
British Library Online Contents | 2008
|