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    Title :

    De-tethering of high aspect ratio metallic and polymeric MEMS/NEMS parts for the direct pick-and-place assembly of 3D microsystem


    Contributors:
    Colinjivadi, K. S. (author) / Cui, Y. (author) / Ellis, M. (author) / Skidmore, G. (author) / Lee, J. B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1621-1626


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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