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    Title :

    Micromachined SiO2 microcantilever for high sensitive moisture sensor


    Contributors:
    Chen, Q. (author) / Fang, J. (author) / Ji, H. F. (author) / Varahramyan, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 6 ; 739-746


    Publication date :

    2008-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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