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    Title :

    Simple fabrication of an uncooled Al/SiO2 microcantilever IR detector based on bulk micromachining


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 3 ; 387-396


    Publication date :

    2014-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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    Uncooled Infrared Detector Development Review

    Tissot, J. L. / Vilain, M. / Yon, J. J. et al. | British Library Conference Proceedings | 1997


    Uncooled detector development for space application

    Rabaud, W. / Vilain, M. / Garret, T. et al. | SPIE | 2008


    Low-cost uncooled ferroelectric detector [2274-27]

    Beratan, H. / Hanson, C. M. / Meissner, E. G. et al. | British Library Conference Proceedings | 1994