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    Title :

    Parameter optimization for an ICP deep silicon etching system


    Contributors:
    Chen, S. C. (author) / Lin, Y. C. (author) / Wu, J. C. (author) / Horng, L. (author) / Cheng, C. H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 465-474


    Publication date :

    2007-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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