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    Title :

    Stable SOI micromachined electrostatic AC voltage reference


    Contributors:
    Kärkkäinen, A. (author) / Pekko, P. (author) / Dekker, J. (author) / Pesonen, N. (author) / Suhonen, M. (author) / Oja, A. (author) / Kyynäräinen, J. (author) / Seppä, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 1-2 ; 169-172


    Publication date :

    2005-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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