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    Title :

    Surface-micromachined electrostatic deflector for wideband tunable WDDM filtering



    Conference:

    Conference; 6th, Optoelectronic interconnects ; 1999 ; San Jose; CA



    Publication date :

    1999-01-01


    Size :

    12 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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