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    Title :

    Tunable Fabry-Perot surface micromachined interferometer-experiments and modeling


    Contributors:
    Müller, R. (author) / Cristea, D. (author) / Tibeica, C. (author) / Arguel, P. (author) / Pons, P. (author) / Rossel, F. (author) / Syvridis, D. (author) / Kusko, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 1-2 ; 91-97


    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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