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    Title :

    Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives


    Contributors:
    Chen, B. (author) / Miao, J. (author) / Tay, F. E. (author)

    Published in:

    Publication date :

    2007-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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