Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
MICROSYSTEM TECHNOLOGIES ; 13 , 1 ; 11-19
01.01.2007
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Silicon Microstructures and Microactuators for Compact Computer Disk Drives
British Library Online Contents | 1994
|Surface Force in Electrostatic Type Microsensors and Microactuators
British Library Online Contents | 1994
|Hard disk drives for spacecraft application
AIAA | 2006
|Hard and soft magnetic materials for electromagnetic microactuators
British Library Online Contents | 2008
|