Surface Force in Electrostatic Type Microsensors and Microactuators
TRANSACTIONS- SOCIETY OF INSTRUMENT AND CONTROL ENGINEERS ; 30 , 2 ; 143
01.01.1994
143 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC: | 629.8 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Microactuators, microsensors and micromechanisms : MAMM 2024
TIBKAT | 2025
|Integrated electromagnetic microactuators with a large driving force
British Library Online Contents | 2005
|British Library Online Contents | 2001
|British Library Online Contents | 2007
|NTRS | 1991