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    Title :

    Surface Force in Electrostatic Type Microsensors and Microactuators


    Contributors:
    Tsuchitani, S. (author) / Suzuki, S. (author) / Shimada, S. (author) / Miki, M. (author)


    Publication date :

    1994-01-01


    Size :

    143 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    629.8



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