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    Title :

    Design, simulation, fabrication, and characterization of a PMMA tunneling sensor based on hot embossing technique


    Contributors:
    Wang, J. (author) / Cui, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 6 ; 452-455


    Publication date :

    2005-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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