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    Title :

    A combinative technique to fabricate hot embossing master for PMMA tunneling sensors


    Contributors:
    Wang, J. (author) / Xue, W. (author) / Cui, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 10 , 4 ; 329-333


    Publication date :

    2004-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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