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    Title :

    Using silicon molds for ultrasonic embossing on Polymethyl Methacrylate (PMMA) substrates


    Contributors:
    Qi, N. (author) / Luo, Y. (author) / Yan, X. (author) / Wang, X. (author) / Wang, L. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 4 ; 609-616


    Publication date :

    2013-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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