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    Title :

    Low cost method for hot embossing of microstructures on PMMA by SU-8 masters


    Contributors:
    Shamsi, A. (author) / Amiri, A. (author) / Heydari, P. (author) / Hajghasem, H. (author) / Mohtashamifar, M. (author) / Esfandiari, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 1925-1931


    Publication date :

    2014-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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