Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Micro wire EDM for high aspect ratio 3D microstructuring of ceramics and metals


    Contributors:
    Schoth, A. (author) / Forster, R. (author) / Menz, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 4/5 ; 250-253


    Publication date :

    2005-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    High aspect ratio meso-scale parts enabled by wire micro-EDM

    Benavides, G. I. / Bieg, L. F. / Saavedra, M. P. et al. | British Library Online Contents | 2002


    Fabrication of compliant high aspect ratio silicon microelectrode arrays using micro-wire electrical discharge machining

    Rakwal, D. / Heamawatanachai, S. / Tathireddy, P. et al. | British Library Online Contents | 2009


    Hot embossing of transparent high aspect ratio micro parts

    Kolew, A. / Heilig, M. / Schneider, M. et al. | British Library Online Contents | 2014


    High aspect ratio electrostatic micro actuators using LIGA process

    Kondo, R. / Takimoto, S. / Suzuki, K. et al. | British Library Online Contents | 2000


    SIGA: A New High Aspect Ratio Micro System Process

    Gmur, M. / Dommann, A. / Rothuizen, H. et al. | British Library Conference Proceedings | 1999