A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications
MICROSYSTEM TECHNOLOGIES ; 11 , 2/3 ; 204-209
2005-01-01
6 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
British Library Online Contents | 2011
|British Library Online Contents | 1999
|Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology
British Library Online Contents | 2015
|British Library Online Contents | 2017
|A micromachined comb drive fork tuning gyroscope for commercial applications
British Library Conference Proceedings | 1995
|