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    Title :

    A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications


    Contributors:
    Lin, W. T. (author) / Chiou, J. C. (author) / Tsou, C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 2/3 ; 204-209


    Publication date :

    2005-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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