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    Title :

    Theoretical and experimental study of capacitance considering fabrication process and edge effect for MEMS comb actuator


    Contributors:
    Zhanshe, G. (author) / Zhou, F. (author) / Le, C. (author) / Shangchun, F. (author)

    Published in:

    Publication date :

    2011-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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