Interference micrometrology of integrated circuit wafers
1st Conference on applied optics and opto-electronics, Applied optics digest ; 1990 ; Nottingham
Applied optics digest ; 125-128
1990-01-01
4 pages
Conference paper
English
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
CANEUS2006-11013 Highly Integrated Solid Propellant Micro-Thrusters Using SOI Wafers
British Library Conference Proceedings | 2006
|Smoother Scribing of Silicon Wafers
NTRS | 1986
|Reciprocating Saw for Silicon Wafers
NTRS | 1985
|Automated Texturization of Silicon Wafers
NTRS | 1985
|Micromachining system accommodates large wafers
British Library Online Contents | 2001
|