Numerical aperture increasing lens (NAIL) microscopy in reflected light imaging of Si integrated circuits is applied to laser signal injection microscopy. The improved lateral spatial resolution and signal to noise ratio provided by NAIL microscopy will greatly enhance the capability of laser signal injection microscopy.


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    Titel :

    Laser signal injection microscopy of Si integrated circuits with a numerical aperture increasing lens


    Beteiligte:
    Ippolito, S.B. (Autor:in) / Goldberg, B.B. (Autor:in) / Unlu, M.S. (Autor:in) / Levin, T.M. (Autor:in) / Vallett, D.P. (Autor:in)


    Erscheinungsdatum :

    2005-01-01


    Format / Umfang :

    1002592 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Laser Signal Injection Microscopy of Si Integrated Circuits with a Numerical Aperture Increasing Lens

    IEEE Lasers and Electro-optics Society | British Library Conference Proceedings | 2005


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