Numerical aperture increasing lens (NAIL) microscopy in reflected light imaging of Si integrated circuits is applied to laser signal injection microscopy. The improved lateral spatial resolution and signal to noise ratio provided by NAIL microscopy will greatly enhance the capability of laser signal injection microscopy.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Laser signal injection microscopy of Si integrated circuits with a numerical aperture increasing lens


    Contributors:
    Ippolito, S.B. (author) / Goldberg, B.B. (author) / Unlu, M.S. (author) / Levin, T.M. (author) / Vallett, D.P. (author)


    Publication date :

    2005-01-01


    Size :

    1002592 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Laser Signal Injection Microscopy of Si Integrated Circuits with a Numerical Aperture Increasing Lens

    IEEE Lasers and Electro-optics Society | British Library Conference Proceedings | 2005


    Comparison of numerical aperture increasing lens and standard subsurface microscopy

    Ippolito, S.B. / Goldberg, B.B. / Unlu, M.S. | IEEE | 2001




    High resolution subsurface thermal imaging using a numerical aperture increasing lens

    Eraslan, M.G. / Vamivakas, A.N. / Ippolito, S.B. et al. | IEEE | 2005