41–60 of 65 hits
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    Calibration tool for a CCD-camera-based vision system [4099-19]

    Xu, G. / Tan, S. L. / Low, S. P. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Effects of particle shape on particle identification and scatter predictions [4449-18]

    Ivakhnenko, V. I. / Stover, J. C. / Scheer, C. A. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Measuring the scatter distribution of PSL spheres on Si wafers using a fast calibrated CMOS photodetector array [4449-20]

    Rinder, T. / Rothe, H. / SPIE | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Microroughness analysis of thin film components for VUV applications [4099-13]

    Ferre-Borrull, J. / Duparre, A. / Steinert, J. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Investigation on total scattering at 157 nm and 193 nm [4099-09]

    Kadkhoda, P. / Welling, H. / Gunster, S. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Accuracy of the thin metallic wires diameter using Fraunhofer diffraction technique [4099-31]

    Serroukh, I. / Martinez-Anton, J. C. / Bernabeu, E. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    New purged UV spectroscopic ellipsometer to characterize thin films and multilayers at 157 nm [4099-25]

    Boher, P. / Evrard, P. / Piel, J.-P. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high-k dielectric film HfO~2 [4099-27]

    Leng, J. / Li, S. / Opsal, J. L. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Measuring small absorption losses of laser pulses in fused silica by a pump and probe technique [4449-03]

    Muhlig, C. / Kufert, S. / Bark-Zollmann, S. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Rapid x-ray reflectivity (XRR) characterization and process monitoring of multilayer Ta/Al~2O~3/Ta/SiO~2/Si [4449-30]

    Leng, J. / Opsal, J. L. / SPIE | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Advantages of a new subnanometer aspheric profiling technique with respect to the unique requirements of EUV lithography mirrors [4449-24]

    Glenn, P. E. / SPIE | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    AFM tip calibration using nanometer-sized structures induced by ion beam sputtering [4449-28]

    Frost, F. / Hirsch, D. / Schindler, A. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Measurement of steep aspheres: a step forward to nanometer accuracy [4449-25]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Polarized light scattering from metallic particles on silicon wafers [4449-39]

    Kim, J. H. / Ehrman, S. H. / Mulholland, G. W. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Microstructure of thin films: correlation with laser damage threshold [4449-35]

    Ciosek, J. / Paszkowicz, W. / Pankowski, P. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Use of light scatter signals to identify particle material (Invited Paper) [4449-17]

    Stover, J. C. / Ivakhnenko, V. I. / Eremin, Y. A. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Quasi-confocal extended field surface sensing [4449-23]

    Cohen-Sabban, J. / Gaillard-Groleas, J. / Crepin, J.-P. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    In-situ ellipsometric measurements of thin film aluminum oxidation [4099-26]

    Lindmark, E. K. / Nowak, J. J. / Kief, M. T. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Stitching interferometry of aspherical surfaces [4449-34]

    Hansel, T. / Nickel, A. / Schindler, A. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries