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    Title :

    Quasi-confocal extended field surface sensing [4449-23]



    Conference:

    Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA



    Publication date :

    2001-01-01


    Size :

    6 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4449

    DataCite | 1930


    X-ray study of surfaces and interfaces [4449-31]

    Asadchikov, V. E. / Bukreeva, I. N. / Duparre, A. et al. | British Library Conference Proceedings | 2001


    Rapid Confocal Sensor: a noncontact profilometer for fast 3D submicron inspection and metrology of large formats [4449-22]

    Vaughnn, D. / Watkins, C. / Anderson, D. et al. | British Library Conference Proceedings | 2001


    IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]

    Boher, P. / Bucchia, M. / Piel, J. P. et al. | British Library Conference Proceedings | 2001


    Stitching interferometry of aspherical surfaces [4449-34]

    Hansel, T. / Nickel, A. / Schindler, A. et al. | British Library Conference Proceedings | 2001