1–20 of 65 hits
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    Optical metrology roadmap for the semiconductor, optical, and data storage industries

    Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries Conference | TIBKAT | 2001
    Keywords: Optical measurements

    Present and future industrial metrology needs for qualification of high-quality optical microlithography materials (Invited Paper) [4449-01]

    Engel, A. / Morsen, E. / Jordanov, A. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Measurement of absorptance of optical coatings for F~2 lithography [4449-02]

    Ouchi, C. / Hasegawa, M. / Matsumoto, A. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]

    Boher, P. / Bucchia, M. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Measurement of total integrated scatter of optical coatings for 157-nm lithography [4449-04]

    Saito, T. / Saito, J. / Nakamura, E. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Versatile optical system for static and dynamic thermomagnetic recording using a scanning laser microscope [4449-26]

    Clegg, W. W. / Jenkins, D. F. / Helian, N. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Interferometric metrology of wafer nanotopography for advanced CMOS process integration (Invited Paper) [4449-21]

    Valley, J. F. / Koliopoulos, C. L. / Tang, S. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool [4449-10]

    Boher, P. / Piel, J. P. / Stehle, J. L. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Rapid Confocal Sensor: a noncontact profilometer for fast 3D submicron inspection and metrology of large formats [4449-22]

    Vaughnn, D. / Watkins, C. / Anderson, D. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    How to measure sub-ppm optical homogeneity in fused silica: impact of temperature on accuracy and reproducibility [4449-14]

    Schoenfeld, D. / Kuehn, B. / Steinert, A. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Combined metrology including VUV spectroscopic ellipsometer and grazing x-ray reflectance for precise characterization of thin films and multilayers at 157 nm [4449-06]

    Boher, P. / Evrard, P. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Infrared spectroscopic ellipsometry for nondestructive characterization of free-carrier and crystal-structure properties of group-III-nitride semiconductor device heterostructures [4449-08]

    Schubert, M. / Kasic, A. / Figge, S. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project (Invited Paper) [4449-27]

    Rothe, H. / Wilkening, G. / Huser, D. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Standardization of the measurement of laser-induced damage threshold and material absorption [4449-12]

    Wood, R. M. / SPIE | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Measurement of the elastic constants of nanometric films [4449-16]

    Beghi, M. G. / Bottani, C. E. / Bassi, A. L. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Diffractive solid immersion lenses: characterization and manufacturing [4449-29]

    Brunner, R. / Bischoff, J. / Rudolf, K. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    X-ray study of surfaces and interfaces [4449-31]

    Asadchikov, V. E. / Bukreeva, I. N. / Duparre, A. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Automated high-accuracy measuring system for specular microreflectivity [4449-15]

    Grunwald, R. / Nerreter, S. / Tomm, J. W. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Recent developments in spectroscopic ellipsometry for in-situ applications (Invited Paper) [4449-07]

    Johs, B. D. / Hale, J. / Ianno, N. J. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries

    Effects of particle shape on particle identification and scatter predictions [4449-18]

    Ivakhnenko, V. I. / Stover, J. C. / Scheer, C. A. et al. | British Library Conference Proceedings | 2001
    Keywords: optical metrology , semiconductor industries , data storage industries