A high-sensitivity torsional silicon accelerometer for automotive air bag systems has been developed using wet etching of single crystal silicon and a silicon-glass bonding technique. The fabricated accelerometer yields a sensitivity of 100 mV/G, and a nonlinearity of 1.13% over a range of -22 G to 22 G. The minimum detectable acceleration measured by the readout electronics is 25 mG.


    Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    High performance torsional silicon accelerometer for automotive air bags


    Contributors:

    Published in:

    Electronics Letters ; 38 , 23 ; 1435-1437


    Publication date :

    2002


    Size :

    3 Seiten, 4 Quellen




    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English




    ISAAC - integrated silicon automotive accelerometer

    Spangler, L. / Kemp, C.J. | Tema Archive | 1995


    ISAAC: integrated silicon automotive accelerometer

    Spangler, L.C. / Kemp, C.J. | Tema Archive | 1996


    Piezoresistive silicon accelerometer for automotive applications

    Seidel, H. / Fritsch, U. / Gottinger, R. et al. | Tema Archive | 1993


    IDENTIFICATION OF AUTOMOTIVE AIR BAGS

    SAE Technical Papers | 1989


    Semiconductor Accelerometer for Automotive Controls

    M. Tsugai / M. Bessho / T. Takeuchi | NTIS | 1987