A high-sensitivity torsional silicon accelerometer for automotive air bag systems has been developed using wet etching of single crystal silicon and a silicon-glass bonding technique. The fabricated accelerometer yields a sensitivity of 100 mV/G, and a nonlinearity of 1.13% over a range of -22 G to 22 G. The minimum detectable acceleration measured by the readout electronics is 25 mG.
High performance torsional silicon accelerometer for automotive air bags
Electronics Letters ; 38 , 23 ; 1435-1437
2002
3 Seiten, 4 Quellen
Article (Journal)
English
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