Piezoelectric materials have been broadly used in many scientific applications, and they are often entrenched in electronic systems. Piezoelectric biochemical sensors consists of a cluster of diagnostic devices that works on the principle of affinity interaction, recording the piezoelectric effect. Piezoelectric effect is a phenomenon of inducing voltage when a material is stressed mechanically, i.e. mechanical energy is getting converted to electrical energy, or piezoelectric crystal is a part of the sensor which operates based on the theory of resonance frequency of microcantilever that changes due to attraction of the required mass on the piezoelectric crystal plane. In this paper, the piezoelectric material was optimized for the biochemical sensor by using COMSOL multiphysics finite element analysis software. In solid-state principle, the static study was carried on different piezoelectric material embedded on the microcantilever to optimize the piezoelectric material which will induce more voltage and to sense lower biochemical concentration on the surface of microcantilever. From the analysis carried, it was observed that the electric potential obtained is more in quartz material compared to other materials.


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    Title :

    Study and Optimization of Piezoelectric Materials for MEMS Biochemical Sensor Applications


    Additional title:

    Lect. Notes Electrical Eng.


    Contributors:


    Publication date :

    2021-08-21


    Size :

    7 pages





    Type of media :

    Article/Chapter (Book)


    Type of material :

    Electronic Resource


    Language :

    English




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