Aluminium Nitride, polyimide, piezoelectric, flexible, MEMS
Flexible Aluminium Nitride/Polyimide piezoelectric material for MEMS applications
2013
Online-Ressource (3 S., 237,57 KB)
Ill., graph. Darst.
Digital preservation by Technische Informationsbibliothek (TIB) / Leibniz-Informationszentrum Technik und Naturwissenschaften und Universitätsbibliothek
Conference paper
Electronic Resource
English
British Library Conference Proceedings | 2005
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