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    Title :

    Study and Optimization of Piezoelectric Materials for MEMS Biochemical Sensor Applications


    Contributors:

    Conference:

    AREEV ; 2020 ; Nitte



    Publication date :

    2022



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English



    Classification :

    BKL:    52.56 Regenerative Energieformen, alternative Energieformen / 55.20 Straßenfahrzeugtechnik



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