An SOI type pressure sensor has been developed which can measure pressure at high temperature environments above 150°C.SOI stands for Silicon On Insulator. A single-crystalline silicon layer is located on an insulating layer formed on a silicon substrate. The piezoresistors of the SOI type pressure sensor are made from the single-crystalline silicon layer which is isolated from the silicon substrate by the insulating layer. There is no leakage current from the piezoresistors. The SOI structure is made by the laser-recrystallization-method.The properties of the SOI type pressure senor are as good as conventional semiconductor pressure sensors.


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    Title :

    SOI Type Pressure Sensor for High Temperature Pressure Measurement


    Additional title:

    Sae Technical Papers


    Contributors:

    Conference:

    International Congress & Exposition ; 1994



    Publication date :

    1994-03-01




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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